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Microlithography and metrology in micromachiningMicrolithography and metrology in micromachining

Microlithography and metrology in micromachining

Michael T. Postek

Details

OL Work ID
OL18329345W

Subjects

MicromachiningMensurationCongressesMicrolithographyMeasurementMicromechanics

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Book data from Open Library. Cover images courtesy of Open Library.