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Microsystems metrology and inspectionMicrosystems metrology and inspection

Microsystems metrology and inspection

Christophe Gorecki

Details

OL Work ID
OL18298112W

Subjects

Microelectromechanical systemsMensurationCongressesInterferometryOptical instrumentsMicroelectronicsIndustrial applicationsMeasurementOptics

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Book data from Open Library. Cover images courtesy of Open Library.