Lex

Browse

GenresShelvesPremiumBlog

Company

AboutJobsPartnersSell on LexAffiliates

Resources

DocsInvite FriendsFAQ

Legal

Terms of ServicePrivacy Policygeneral@lex-books.com(215) 703-8277

© 2026 LexBooks, Inc. All rights reserved.

CMOS-MEMS

CMOS-MEMS

Jan G. Korvink, Henry Baltes, Christofer Hierold, G. K. Fedder, O. Brand

Details

OL Work ID
OL21055194W

Subjects

Microelectromechanical systemsMetal oxide semiconductors, complementaryNanotechnology

Find this book

GoodreadsOpen Library
Book data from Open Library. Cover images courtesy of Open Library.