CMOS-MEMS
CMOS-MEMS
Jan G. Korvink, Henry Baltes, Christofer Hierold, G. K. Fedder, O. Brand
Details
- OL Work ID
- OL21055194W
Subjects
Microelectromechanical systemsMetal oxide semiconductors, complementaryNanotechnology
Jan G. Korvink, Henry Baltes, Christofer Hierold, G. K. Fedder, O. Brand