Optical Nano And Micro Actuator Technology

Optical Nano And Micro Actuator Technology
Details
- OL Work ID
- OL17423563W
Subjects
NanotechnologyMicroelectromechanical systemsManipulators (Mechanism)PhotonicsActuatorsDesign and constructionNanostructured materialsMechatronicsOptical storage devicesOptoelectronic devicesOptical equipmentMicro-Electrical-Mechanical SystemsNanostructuresActionneursManipulateurs (Mécanismes)Équipement optiqueMécatroniqueMicrosystèmes électromécaniques