Enabling technology for MEMS and nanodevices
Enabling technology for MEMS and nanodevices
Jan G. Korvink
,
Henry Baltes
,
Gary K. Fedder
,
Oliver Brand
Details
OL Work ID
OL19124441W
Subjects
Microelectromechanical systems
Nanotechnology
Microelectronics
Electromechanical devices
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