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Science and technology of microfabricationScience and technology of microfabrication

Science and technology of microfabrication

R. E. Howard

Details

OL Work ID
OL18867955W

Subjects

Very large scale integrationMicrofabricationCongressesIntegrated circuitsDesign and constructionMaterials, researchIntegrated circuits, very large scale integrationManufacturing processes

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