Adhesion aspects in MEMS-NEMS

Adhesion aspects in MEMS-NEMS
Details
- OL Work ID
- OL16506917W
Subjects
Nanoelectromechanical systemsMicroelectromechanical systemsSurfaces (Technology)AdhesionSurfaces (technology)NanostructuresMicro-Electrical-Mechanical SystemsAdhesivenessMicrosystèmes électromécaniquesNanosystèmes électromécaniquesAdhésion (Physique)Surfaces (Technologie)TECHNOLOGY & ENGINEERINGElectronicsDigitalMicroelectronics