Mems and Nanotechnology
Mems and Nanotechnology
Shaw, Gordon, III, Jennifer Hay, LaVern Starman, Barton C. Prorok
Details
- OL Work ID
- OL25624517W
Subjects
Materials, mechanical propertiesNanotechnologyMicroelectromechanical systems
Shaw, Gordon, III, Jennifer Hay, LaVern Starman, Barton C. Prorok