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Sputtering by particle bombardmentSputtering by particle bombardment

Sputtering by particle bombardment

Wolfgang Eckstein, Rainer Behrisch

Details

OL Work ID
OL16959902W

Subjects

Sputtering (Physics)ChemistryPlasma (Ionized gases)Surfaces (Physics)Thin Films Surfaces and InterfacesPlasma Physics Atoms and Molecules in Strong FieldsIonsSpectrometry, Mass, Fast Atom Bombardment

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