Sputtering by particle bombardment

Sputtering by particle bombardment
Details
- OL Work ID
- OL16959902W
Subjects
Sputtering (Physics)ChemistryPlasma (Ionized gases)Surfaces (Physics)Thin Films Surfaces and InterfacesPlasma Physics Atoms and Molecules in Strong FieldsIonsSpectrometry, Mass, Fast Atom Bombardment