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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Denis Flandre, Jean-Pierre Raskin, Jean Laconte

Details

OL Work ID
OL27314455W

Subjects

DetectorsThin films

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Book data from Open Library. Cover images courtesy of Open Library.