NEMS/MEMS technology and devices

NEMS/MEMS technology and devices
selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, symposium L, 28 June - 3 July,
Details
- OL Work ID
- OL16445168W
Subjects
Nanoelectromechanical systemsMicroelectromechanical systemsCongressesNanostructuresMaterialsTechnology