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NEMS/MEMS technology and devicesNEMS/MEMS technology and devices

NEMS/MEMS technology and devices

selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, symposium L, 28 June - 3 July,

H. Li

Details

OL Work ID
OL16445168W

Subjects

Nanoelectromechanical systemsMicroelectromechanical systemsCongressesNanostructuresMaterialsTechnology

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