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Tribology in chemical-mechanical planarizationTribology in chemical-mechanical planarization

Tribology in chemical-mechanical planarization2005

Hong Liang, David Craven, Hong Liang

Details

First published
2005
OL Work ID
OL13640198W

Subjects

TribologyGrinding and polishingTechnology: General IssuesPower ToolsScienceHome Improvement / ConstructionScience/MathematicsEngineering - GeneralMaterial ScienceTechnology / Material ScienceChemistry - GeneralChemical mechanical planarizationTribologie (Technologie)Planarisation chimicomécaniqueHOUSE & HOME

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