Tribology in chemical-mechanical planarization

Tribology in chemical-mechanical planarization2005
Details
- First published
- 2005
- OL Work ID
- OL13640198W
Subjects
TribologyGrinding and polishingTechnology: General IssuesPower ToolsScienceHome Improvement / ConstructionScience/MathematicsEngineering - GeneralMaterial ScienceTechnology / Material ScienceChemistry - GeneralChemical mechanical planarizationTribologie (Technologie)Planarisation chimicomécaniqueHOUSE & HOME