Pulsed and pulsed bias sputtering

Pulsed and pulsed bias sputtering
Details
- OL Work ID
- OL9162917W
Subjects
Cathode sputtering (Plating process)Thin filmsSemi-conductors & super-conductorsPhysicsElectronics - SemiconductorsScienceTechnology & Industrial ArtsScience/MathematicsEngineering - GeneralMaterial ScienceScience : PhysicsTechnology / Engineering / GeneralTechnology / OpticsTechnology : Material ScienceGeneralCathode sputtering (Plating pr