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Pulsed and pulsed bias sputteringPulsed and pulsed bias sputtering

Pulsed and pulsed bias sputtering

Edward V. Barnat, Toh-Ming Lu

Details

OL Work ID
OL9162917W

Subjects

Cathode sputtering (Plating process)Thin filmsSemi-conductors & super-conductorsPhysicsElectronics - SemiconductorsScienceTechnology & Industrial ArtsScience/MathematicsEngineering - GeneralMaterial ScienceScience : PhysicsTechnology / Engineering / GeneralTechnology / OpticsTechnology : Material ScienceGeneralCathode sputtering (Plating pr

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