Electromigration in thin films and electronic devices

Electromigration in thin films and electronic devices
Details
- OL Work ID
- OL16521129W
Subjects
ElectrodiffusionIntegrated circuitsDeteriorationThin filmsInterconnects (Integrated circuit technology)DiffusionCouches mincesTECHNOLOGY & ENGINEERINGMechanical