Auger electron spetroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films
Auger electron spetroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films
Details
- OL Work ID
- OL8857001W
Subjects
Amorphous materialsAmorphous semiconductorsBoron nitrideBoron nitridesCarbonDielectricsPlasma diodesSemiconductor devices