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Materials for Mechanical and Optical MicrosystemsMaterials for Mechanical and Optical Microsystems

Materials for Mechanical and Optical Microsystems

Ernst Obermeier, M. Elwenspoek, H. Fujita

Details

OL Work ID
OL21080164W

Subjects

Materials, researchMeasure theoryMaterialsOptical filmsElectromechanical devicesCongressesMicroelectronicsThin films

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