Materials Issues in Novel Si-Based Technology
Materials Issues in Novel Si-Based Technology2014
Mansun Chan, Erin C. Jones, William G. En, James C. Turm, Sandip Tiwari
Details
- First published
- 2014
- OL Work ID
- OL21531329W
Subjects
SiliconSemiconductorsIntegrated circuitsLogic circuitsDielectrics