Silicon micromachining

Silicon micromachining1998

M. Elwenspoek, M. Elwenspoek, H. V. Jansen

Details

First published: 1998
OL Work ID: OL11983431W

Subjects

SiliconMicromachiningEtchingElectronic devices & materialsTechnologyMicroelectronicsSemiconductor PhysicsTechnology & Industrial ArtsScience/MathematicsElectronics - Circuits - GeneralEngineering - Electrical & ElectronicMaterial ScienceTechnology / Engineering / ElectricalElectronics - MicroelectronicsSemiconductorsEtching, technique

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