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Handbook of advanced plasma processing techniquesHandbook of advanced plasma processing techniques

Handbook of advanced plasma processing techniques

S. J. Pearton

Details

OL Work ID
OL20977534W

Subjects

Plasma etchingPlasma engineeringPlasma sprayingElectronic circuitsIntegrated circuitsDesign and constructionPlasma (ionized gases)Semiconductors

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Book data from Open Library. Cover images courtesy of Open Library.