Smart sensors, actuators, and MEMS
Smart sensors, actuators, and MEMS
V. K. Varadan
,
Carles Cané
,
Jung-Chih Chiao
Details
OL Work ID
OL18852971W
Subjects
Microelectromechanical systems
Scanning systems
Congresses
Actuators
Detectors
Industrial applications
Microtechnology
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