
Novel Advances in Microsystems Technologies and Their Applications
Subjects
Microelectromechanical systemsMicroelectronicsTECHNOLOGY & ENGINEERING / Electronics / GeneralTECHNOLOGY & ENGINEERING / Electronics / MicroelectronicsTECHNOLOGY & ENGINEERING / Nanotechnology & MEMSMiniaturizationMicroélectroniqueTECHNOLOGY & ENGINEERINGElectronicsGeneralNanotechnology & MEMSDigital