Functional Thin Films and Nanostructures for Sensors

Functional Thin Films and Nanostructures for Sensors
Details
- OL Work ID
- OL19851678W
Subjects
Dispositifs à couches mincesNanosystèmes électromécaniquesThin film devicesNanoelectromechanical systemsDetectorsDünne SchichtNanostrukturiertes MaterialSensorNanostructures