New Trends in Ion Beam Processing of Materials and Beam Induced Nanometric Phenomena
New Trends in Ion Beam Processing of Materials and Beam Induced Nanometric Phenomena
F. Priolo, J. M. Poate, J. K. N. Lindner, E. E. B. Campbell, A. Nylandsted Larsen
Details
- OL Work ID
- OL21080912W
Subjects
Ion bombardmentNanostructures