
MEMS and Nanotechnology, Volume 8
Jennifer Hay, Gordon Shaw III, LaVern Starman, Barton C. Prorok
Details
- OL Work ID
- OL20715395W
Subjects
Microelectromechanical systemsNanotechnologyMaterials, mechanical properties

Jennifer Hay, Gordon Shaw III, LaVern Starman, Barton C. Prorok