Lex

Browse

GenresShelvesPremiumBlog

Company

AboutJobsPartnersSell on LexAffiliates

Resources

DocsInvite FriendsFAQ

Legal

Terms of ServicePrivacy Policygeneral@lex-books.com(215) 703-8277

© 2026 LexBooks, Inc. All rights reserved.

Plasma processing for VLSIPlasma processing for VLSI

Plasma processing for VLSI

Dale M. Brown, Norman G. Einspruch

Details

OL Work ID
OL19174285W

Subjects

Plasma (Ionized gases)Very large scale integrationIndustrial applicationsIntegrated circuits

Find this book

Open Library
Book data from Open Library. Cover images courtesy of Open Library.