Tungsten and Other Advanced Metals for Ulsi Applications in 1990
Tungsten and Other Advanced Metals for Ulsi Applications in 19901991
Details
- First published
- 1991
- OL Work ID
- OL2538669W
Subjects
TungstenIntegrated circuits, ultra large scale integrationIntegrated circuitsVery large scale integrationMaterialsCongressesHeat resistant alloys