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Optical metrology and inspection for industrial applications

Optical metrology and inspection for industrial applications2010

Peisen S. Huang, Tōru Yoshizawa, Kevin G. Harding

Details

First published
2010
OL Work ID
OL16716775W

Subjects

Engineering inspectionIndustrial applicationsOptical methodsQuality controlCongressesOptical measurementsOptical detectorsInterferometry

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