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Device and Process Technologies for Mems ,Microelectronics, and PhotonicsDevice and Process Technologies for Mems ,Microelectronics, and Photonics

Device and Process Technologies for Mems ,Microelectronics, and Photonics

Jamieson, David, Vijay Varadan, Alex Hariz, Jung-Chih Chiao

Details

OL Work ID
OL21000506W

Subjects

PhotonicsPhotomechanical processesPhotolithographyMicroelectromechanical systemsCongressesPhoton detectorsDesign and construction

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