Materials Science of Microelectromechanical Systems Devices II
Materials Science of Microelectromechanical Systems Devices II2014
Maarten P. de Boer, Arthur H. Heuer, S. Joshua Jacobs, Eric Peeters
Details
- First published
- 2014
- OL Work ID
- OL21531261W
Subjects
Microelectromechanical systemsMicroelectronics