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MicrolithographyMicrolithography

Microlithography1986

David J. Elliott

About this book

xix, 378 pages : 24 cm

Details

First published
1986
OL Work ID
OL2927174W

Subjects

Very large scale integrationDesign and constructionMicrolithographyIntegrated circuitsPhotoresistsIntegrated circuits -- Very large scale integration -- Design and construction

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Open Library
Book data from Open Library. Cover images courtesy of Open Library.