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Design, test, integration and packaging of MEMS/MOEMS 2001Design, test, integration and packaging of MEMS/MOEMS 2001

Design, test, integration and packaging of MEMS/MOEMS 2001

B. Courtois

Details

OL Work ID
OL23791316W

Subjects

Microelectromechanical systemsCongressesOptoelectronic devicesMicromachiningMicroelectronic packaging

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