Low-energy sputtering studies of boron nitride with xenon ions
Low-energy sputtering studies of boron nitride with xenon ions
Details
- OL Work ID
- OL4260133W
Subjects
Charged particlesElectron gunsHeavy elementsIon beamsIsotopesIsotopic enrichmentMass spectrometersMass spectroscopyNeutral particlesQuadrupoles