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Low-energy sputtering studies of boron nitride with xenon ions

Low-energy sputtering studies of boron nitride with xenon ions

P. K. Ray

Details

OL Work ID
OL4260133W

Subjects

Charged particlesElectron gunsHeavy elementsIon beamsIsotopesIsotopic enrichmentMass spectrometersMass spectroscopyNeutral particlesQuadrupoles

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