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NanopatterningNanopatterning

Nanopatterning

Daniel Herr, Lhadi Merhari, Marie Angelopoulos, Elizabeth A. Dobisz, Kenneth E. Gonsalves

Details

OL Work ID
OL21531464W

Subjects

NanotechnologyNanostructuresIntegrated circuits, ultra large scale integrationMicrolithographyBiotechnology

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