Lex

Browse

GenresShelvesPremiumBlog

Company

AboutJobsPartnersSell on LexAffiliates

Resources

DocsInvite FriendsFAQ

Legal

Terms of ServicePrivacy Policygeneral@lex-books.com(215) 703-8277

© 2026 LexBooks, Inc. All rights reserved.

Advances in mirror technology for X-ray, EUV lithography, laser and other applications

Advances in mirror technology for X-ray, EUV lithography, laser and other applications

Ali M. Khounsary, Udo Dinger

Details

OL Work ID
OL18227330W

Subjects

Optical radiometryLasersMirrorsCongressesOptical coatingsDesign and constructionExtreme ultraviolet lithographyOptics

Find this book

Open Library
Book data from Open Library. Cover images courtesy of Open Library.