Advances in mirror technology for X-ray, EUV lithography, laser and other applications
Ali M. Khounsary
,
Udo Dinger
Details
OL Work ID
OL18227330W
Subjects
Optical radiometry
Lasers
Mirrors
Congresses
Optical coatings
Design and construction
Extreme ultraviolet lithography
Optics
Find this book
Open Library