Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Thomas Ann Suleski, Eric Johnson undifferentiated, Mary Maher, Harold Stewart, Jung-Chih Chiao
Details
- OL Work ID
- OL21021390W
Subjects
MachiningIntegrated opticsMiniature electronic equipmentOptoelectronic devicesMicroelectromechanical systemsMicromachiningCongressesDesign and constructionMicrofabrication