Measurement Technology for Micro-Nanometer Devices

Measurement Technology for Micro-Nanometer Devices
Wendong Zhang, Dachao Li, Chenyang Xue, Haifei Bao, Tielin Shi, Zongmin Ma, Jingdong Chen, Liguo Chen, Xiujian Chou
Details
- OL Work ID
- OL20482367W
Subjects
Physical measurementsMeasurementNanotechnologyTestingMicrotechnologyMicroelectromechanical devicesMicroscopy, techniqueMicroelectromechanical systems