Lex

Browse

GenresShelvesPremiumBlog

Company

AboutJobsPartnersSell on LexAffiliates

Resources

DocsInvite FriendsFAQ

Legal

Terms of ServicePrivacy Policygeneral@lex-books.com(215) 703-8277

© 2026 LexBooks, Inc. All rights reserved.

Measurement Technology for Micro-Nanometer DevicesMeasurement Technology for Micro-Nanometer Devices

Measurement Technology for Micro-Nanometer Devices

Wendong Zhang, Dachao Li, Chenyang Xue, Haifei Bao, Tielin Shi, Zongmin Ma, Jingdong Chen, Liguo Chen, Xiujian Chou

Details

OL Work ID
OL20482367W

Subjects

Physical measurementsMeasurementNanotechnologyTestingMicrotechnologyMicroelectromechanical devicesMicroscopy, techniqueMicroelectromechanical systems

Find this book

Open Library
Book data from Open Library. Cover images courtesy of Open Library.