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Smart sensors, actuators, and MEMS IV

Smart sensors, actuators, and MEMS IV2009

Schmid, Ulrich Prof, Herbert R.. Shea, Carles Cané

Details

First published
2009
OL Work ID
OL16568210W

Subjects

Microelectromechanical systemsScanning systemsCongressesActuatorsDetectorsIndustrial applicationsMicrotechnology

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Book data from Open Library. Cover images courtesy of Open Library.