Micro-Electro-Mechanical Systems (Mems) 1998: Micro-Manuacturing Processes in Mems and Other Advanced Systems (Dsc (Series), Vol. 66.)

Micro-Electro-Mechanical Systems (Mems) 1998: Micro-Manuacturing Processes in Mems and Other Advanced Systems (Dsc (Series), Vol. 66.)
Ga.) International Mechanical Engineering Congress and Exposition (1996 : Atlanta
Details
- OL Work ID
- OL8359670W
Subjects
Microelectromechanical systemsCongressesFluidic devices