Rapid Thermal and Integrated Processing
Rapid Thermal and Integrated Processing2014
Martin L. Green, Jeffrey C. Gelpey, Rajendra Singh, Jimmie J. Wortman
Details
- First published
- 2014
- OL Work ID
- OL21531432W
Subjects
SemiconductorsVapor-plating
Martin L. Green, Jeffrey C. Gelpey, Rajendra Singh, Jimmie J. Wortman