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Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV2008

Hark Hoe Tan

Details

First published
2008
OL Work ID
OL15576392W

Subjects

Microelectromechanical systemsCongressesPhotolithographyPhotonicsNanotechnologyPhotomechanical processes

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Book data from Open Library. Cover images courtesy of Open Library.