Polysilicon thin films and interfaces

Polysilicon thin films and interfaces
Theodore Kamins, Bruha Raicu, C. V. Thompson, Theodore I. Kamins
Details
- OL Work ID
- OL19207673W
Subjects
SiliconThin film devicesMaterialsCongressesElectric propertiesIntegrated circuitsScience/MathematicsElectronic Apparatus And DevicesThin films