Design, test, integration, and packaging of MEMS/MOEMS 2002

Design, test, integration, and packaging of MEMS/MOEMS 2002
Details
- OL Work ID
- OL18832912W
Subjects
MicromachiningMicroelectromechanical systemsCongressesMicroelectronic packagingOptoelectronic devicesMicroelectronicsOptoelectronics