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Design, test, integration, and packaging of MEMS/MOEMS 2002Design, test, integration, and packaging of MEMS/MOEMS 2002

Design, test, integration, and packaging of MEMS/MOEMS 2002

B. Courtois

Details

OL Work ID
OL18832912W

Subjects

MicromachiningMicroelectromechanical systemsCongressesMicroelectronic packagingOptoelectronic devicesMicroelectronicsOptoelectronics

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