Mechanical microsensors

Mechanical microsensors
Details
- OL Work ID
- OL18617521W
Subjects
SiliconMicroelectromechanical systemsTransducersMicromachiningDetectorsDesign and constructionMicroelectronicsMicromechanicsMachiningDetectors--design and constructionMicroelectromechanical systems--design and constructionTk7875 .e49 2001681/.2