Lex

Browse

GenresShelvesPremiumBlog

Company

AboutJobsPartnersSell on LexAffiliates

Resources

DocsInvite FriendsFAQ

Legal

Terms of ServicePrivacy Policygeneral@lex-books.com(215) 703-8277

© 2026 LexBooks, Inc. All rights reserved.

Mechanical microsensorsMechanical microsensors

Mechanical microsensors

R. Wiegerink, M. Elwenspoek

Details

OL Work ID
OL18617521W

Subjects

SiliconMicroelectromechanical systemsTransducersMicromachiningDetectorsDesign and constructionMicroelectronicsMicromechanicsMachiningDetectors--design and constructionMicroelectromechanical systems--design and constructionTk7875 .e49 2001681/.2

Find this book

Open Library
Book data from Open Library. Cover images courtesy of Open Library.