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Photodeposition of nitride insulators on III-V substrates

Photodeposition of nitride insulators on III-V substrates1984

George J. Collins

Details

First published
1984
OL Work ID
OL1582945W

Subjects

Laser applicationsVapor depositionLong term effectsNitridesSilicon-on-insulator technologyThin filmsStorage stability

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Book data from Open Library. Cover images courtesy of Open Library.