Advanced metallization and interconnect systems for ULSI applications in 1996

Advanced metallization and interconnect systems for ULSI applications in 1996
Details
- OL Work ID
- OL19029505W
Subjects
Vapor-platingDielectricsTitanium nitrideElectrochemical metallizingDesign and constructionCongressesUltra large scale integrationIntegrated circuitsInterconnected electric utility systems