The Certification of a Reference Material for the Determination of Oxygen in Semiconductor Silicon by Infra-red Spectrometry
The Certification of a Reference Material for the Determination of Oxygen in Semiconductor Silicon by Infra-red Spectrometry1991
Details
- First published
- 1991
- OL Work ID
- OL8647153W
Subjects
SiliconInfrared spectroscopyIntegrated circuits