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The Certification of a Reference Material for the Determination of Oxygen in Semiconductor Silicon by Infra-red Spectrometry

The Certification of a Reference Material for the Determination of Oxygen in Semiconductor Silicon by Infra-red Spectrometry1991

S. Vandendriessche

Details

First published
1991
OL Work ID
OL8647153W

Subjects

SiliconInfrared spectroscopyIntegrated circuits

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Book data from Open Library. Cover images courtesy of Open Library.