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Design, Test, and Microfabrication of MEMS and MOEMSDesign, Test, and Microfabrication of MEMS and MOEMS

Design, Test, and Microfabrication of MEMS and MOEMS

Hiroyuki Fujita, SPIE, Selden B. Crary, Wolfgang Ehrfeld

Details

OL Work ID
OL20989908W

Subjects

MicroelectronicsMicroelectromechanical systemsCongressesTestingOptoelectronic devicesMicromachiningComputer-aided designDetectors

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