Lex

Browse

GenresShelvesPremiumBlog

Company

AboutJobsPartnersSell on LexAffiliates

Resources

DocsInvite FriendsFAQ

Legal

Terms of ServicePrivacy Policygeneral@lex-books.com(215) 703-8277

© 2026 LexBooks, Inc. All rights reserved.

Single chamber processingSingle chamber processing

Single chamber processing

proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992

European Materials Research Society. Meeting

Details

OL Work ID
OL4314503W

Subjects

CongressesVacuum technologySemiconductorsDesign and construction

Find this book

Open Library
Book data from Open Library. Cover images courtesy of Open Library.