Lex

Browse

GenresShelvesPremiumBlog

Company

AboutJobsPartnersSell on LexAffiliates

Resources

DocsInvite FriendsFAQ

Legal

Terms of ServicePrivacy Policygeneral@lex-books.com(215) 703-8277

© 2026 LexBooks, Inc. All rights reserved.

Advances in Metrology for X-Ray and EUV Optics II

Advances in Metrology for X-Ray and EUV Optics II

Masaru Ohtsuka, Peter Takacs, Lahsen Assoufid

Details

OL Work ID
OL21015320W

Subjects

Optical measurementsMeasuring instrumentsInterferometersMeasurementCongressesOptical instrumentsDesign and constructionLaser interferometers

Find this book

Open Library
Book data from Open Library. Cover images courtesy of Open Library.