Advances in CMP/polishing technologies for the manufacture of electronic devices
Advances in CMP/polishing technologies for the manufacture of electronic devices
About this book
CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover.
Details
- OL Work ID
- OL16565398W
Subjects
Electrolytic polishingGrinding and polishingChemical mechanical planarizationTECHNOLOGY & ENGINEERINGTechnical & Manufacturing Industries & Trades